Intel hedges its bet for High-NA EUV with the 14A process node — an alternate Low-NA technique has identical yield and design rules

However, Intel has not yet fully committed to using the new tool in production, but it has an alternative production flow of its 14A node that uses standard Low-NA EUV as a backup plan.

This does not inspire confidence, but it's good that the this seems to have minimal impact on customer design (design are compatible across both processes).